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BEGIN:VEVENT
UID:event476@CC UPOB e.V.
DTSTAMP:20260430T080701Z
CATEGORIES:Info extern
DESCRIPTION:Plasma-Assisted Etching and Reactive Ion Etching Using High and
  Low Density Plasmas\nKategorie: Info extern\nICS-Link: https://upob.de/in
 dex.php?option=com_jem&view=event&id=476:plasma-assisted-etching-and-react
 ive-ion-etching-using-high-and-low-density-plasmas\n
DTSTART;VALUE=DATE:20161024
DTEND;VALUE=DATE:20161026
LOCATION:Grenoble\,Grenoble
SUMMARY:Plasma-Assisted Etching and Reactive Ion Etching Using High and Low
  Density Plasmas
URL:https://upob.de/index.php?option=com_jem&view=event&id=476:plasma-assis
 ted-etching-and-reactive-ion-etching-using-high-and-low-density-plasmas
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