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BEGIN:VEVENT
UID:event477@CC UPOB e.V.
DTSTAMP:20260430T080640Z
CATEGORIES:Info extern
DESCRIPTION:Plasma Etching for CMOS Technology and ULSI Applications\nKateg
 orie: Info extern\nICS-Link: https://upob.de/index.php?option=com_jem&view
 =event&id=477:plasma-etching-for-cmos-technology-and-ulsi-applications\n
DTSTART;VALUE=DATE:20161026
DTEND;VALUE=DATE:20161029
LOCATION:Grenoble\,Grenoble
SUMMARY:Plasma Etching for CMOS Technology and ULSI Applications
URL:https://upob.de/index.php?option=com_jem&view=event&id=477:plasma-etchi
 ng-for-cmos-technology-and-ulsi-applications
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