Optics Symposium: Novel Coating Technologies for Precision Optics in the Nano Era

Photonics is a key technology of the twenty-first century. Almost no area of life today can operate without optical technologies. In addition to the known areas such as data and communication technology, photonics has become indispensable in many more areas. New applications appear on a daily basis. With an increasing number of applications, requirements with regard to productivity and quality increase as well.

Traditional optical coating processes have been refined in the past 80 years and have now reached their maximal capacity. In order  to meet the ever increasing needs, new coating processes with continuative potentials become necessary.

Magnetron sputtering closes the gap between the traditional ion-assisted vapor deposition and ion beam sputtering. It combines the advantages of both technologies. Very dense layers with low absorption and scattering as well as high stability against environmental influences can be created this way. Magnetron sputtering processes show high retention rates and have an excellent process stability and process reproducibility.

New plant concepts with high batch capacity and high reproducibility achieve production costs that are comparable with ion-assisted vapor deposition plants. Therefore, it is expected that applications in the middle to lower segment of precision optics that operate with magnetron sputtering can be produced economically.

Schedule

Monochrome Optical Monitoring
Dr. Simon Hicks; Intellemetrics Global Ltd, Paisley, UK

High Density Plasma Technology for Optical Coatings
Joseph Kim; TecPort Optics, Orlando, Florida, USA

Magnetron sputtering - Introduction and recent development
Prof. Dr. Günter Bräuer; Fraunhofer IST / INPLAS e.V., Braunschweig, Germany

Production of demanding optical coatings by EOSS®
Dr. Michael Vergöhl; Fraunhofer IST, Braunschweig, Germany

Simulation of Optical Thin Film Growth in PVD Processes
Dr. rer. nat Marco Jupé, Dr. Holger Badorreck, Dr. Aimo Winkelmann; Laser Zentrum Hannover e.V., Hannover, Germany

Latest Process Results from the AVIOR M-300
Dr. Florian Schwarz; SOLAYER GmbH, Dresden, Germany

SOLAYER Optics Products
Andreas Rack; SOLAYER GmbH, Dresden, Germany

Magnetron Sputtering of EUV Multilayer Optics
Dr. Torsten Feigl; optiX fab GmbH, Jena, Germany

Live Demo Session at Kesselsdorf Technology Center

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